Search results for "MEMS"

Hits ?▲	Authors	Title	Venue	Year	Link	Author keywords
118	Jacob K. White 0001, Gary K. Fedder, Tamal Mukherjee	Path toward future CAD environments for MEMS (tutorial abstract).	ICCAD	1999	DBLP DOI BibTeX RDF
109	Raafat R. Mansour, M. Bakri-Kassem, Mahmoud Daneshmand, N. Messiha	RF MEMS Device.	ICMENS	2003	DBLP DOI BibTeX RDF
108	Xingguo Xiong, Yu-Liang Wu, Wen-Ben Jone	Material Fatigue and Reliability of MEMS Accelerometers.	DFT	2008	DBLP DOI BibTeX RDF
105	Bo Hong, Feng Wang 0003, Scott A. Brandt, Darrell D. E. Long, Thomas J. E. Schwarz	Using MEMS-based storage in computer systems - MEMS storage architectures.	ACM Trans. Storage	2006	DBLP DOI BibTeX RDF	cost-performance, economic lifetime, hybrid storage devices, maintenance strategies, storage enclosures, MEMS-based storage
105	Hyokyung Bahn, Soyoon Lee, Sam H. Noh	P/PA-SPTF: Parallelism-aware request scheduling algorithms for MEMS-based storage devices.	ACM Trans. Storage	2009	DBLP DOI BibTeX RDF	seek time, scheduling, parallelism, starvation, MEMS-based storage
98	Soyoon Lee, Hyokyung Bahn	A New Address Mapping Scheme for High Parallelism MEMS-Based Storage Devices.	HPCC	2006	DBLP DOI BibTeX RDF
98	Kaigham J. Gabriel	Microelectromechanical systems (MEMS) tutorial.	ITC	1998	DBLP DOI BibTeX RDF
98	Bikram Baidya, Tamal Mukherjee	Extraction and LVS for mixed-domain integrated MEMS layouts.	ICCAD	2002	DBLP DOI BibTeX RDF	MEMS LVS, MEMS extraction, integrated MEMS, verification, parasitics
95	Mohammed G. Khatib, Ethan L. Miller, Pieter H. Hartel	Workload-based configuration of MEMS-based storage devices for mobile systems.	EMSOFT	2008	DBLP DOI BibTeX RDF	probe-based storage, mems, data layout
91	Ge Yang 0002, James A. Gaines, Bradley J. Nelson	A Supervisory Wafer-Level 3D Microassembly System for Hybrid MEMS Fabrication.	J. Intell. Robotic Syst.	2003	DBLP DOI BibTeX RDF	microgripper design, hybrid MEMS, MEMS fabrication, computer vision, microrobotics, microassembly
91	Benoît Charlot, Salvador Mir, Fabien Parrain, Bernard Courtois	Generation of Electrically Induced Stimuli for MEMS Self-Test.	J. Electron. Test.	2001	DBLP DOI BibTeX RDF	MEMS test case-studies, MEMS failure mechanisms, BIST, self-test
88	Soyoon Lee, Hyokyung Bahn, Sam H. Noh	Parallelism-Aware Request Scheduling for MEMS-based Storage Devices.	MASCOTS	2006	DBLP DOI BibTeX RDF
85	Ann Witvrouw	CMOS-MEMS integration: why, how and what?	ICCAD	2006	DBLP DOI BibTeX RDF	CMOS-MEMS integration, poly-SiGe, technology
85	Ankush Varma, Muhammad Yaqub Afridi, Akin Akturk, Paul Klein, Allen R. Hefner, Bruce L. Jacob	Modeling heterogeneous SoCs with SystemC: a digital/MEMS case study.	CASES	2006	DBLP DOI BibTeX RDF	gas sensor, microhotplate, modeling, power, SystemC, MEMS
82	Rahim Kasim, Bruce C. Kim, Josef Drobnik	Advanced Mems for High Power Integrated Distribution Systems.	ICMENS	2005	DBLP DOI BibTeX RDF	MEMS Circuit breaker, MEMS, power distribution
79	Erik Novak, Der-Shen Wan, Paul Unruh, Joanna Schmit	Dynamic MEMS Measurement Using a Strobed Interferometric System with Combined Coherence Sensing and Phase Information.	ICMENS	2003	DBLP DOI BibTeX RDF
79	Feng Wang 0003, Bo Hong, Scott A. Brandt, Darrell D. E. Long	Using MEMS-Based Storage to Boost Disk Performance.	MSST	2005	DBLP DOI BibTeX RDF
79	Karim Mohammadi, Reza Asgary	Pattern Recognition and Fault Detection in MEMS.	CORES	2005	DBLP DOI BibTeX RDF
79	Bo Hong, Thomas J. E. Schwarz, Scott A. Brandt, Darrell D. E. Long	Reliability of MEMS-Based Storage Enclosures.	MASCOTS	2004	DBLP DOI BibTeX RDF
79	Steven W. Schlosser, John Linwood Griffin, David Nagle, Gregory R. Ganger	Designing computer systems with MEMS-based storage.	ASPLOS	2000	DBLP DOI BibTeX RDF
79	Mona E. Zaghloul, David J. Nagel	The Teaching of Microelectromechanical Systems (MEMS).	MSE	1999	DBLP DOI BibTeX RDF
75	Mohammed G. Khatib, Pieter H. Hartel	Power management of MEMS-based storage devices for mobile systems.	CASES	2008	DBLP DOI BibTeX RDF	probe-based storage, power management, energy, MEMS
69	Xingguo Xiong, Yu-Liang Wu, Wen-Ben Jone	Reliability Analysis of Self-Repairable MEMS Accelerometer.	DFT	2006	DBLP DOI BibTeX RDF
69	Steve C. Chiu, Wei-keng Liao, Alok N. Choudhary	Processor-Embedded Distributed MEMS-Based Storage Systems for High-Performance I/O.	IPDPS	2004	DBLP DOI BibTeX RDF
69	Manas Behera, Volodymyr Kratyuk, Yutao Hu, Kartikeya Mayaram	Accurate simulation of phase noise in RF MEMS VCOs.	ISCAS (3)	2004	DBLP DOI BibTeX RDF
68	Tamal Mukherjee	MEMS Design And Verification.	ITC	2003	DBLP DOI BibTeX RDF	MEMS CAD, MEMS design methodology, composable design, integrated MEMS design, modular design
66	Minha Park, Yang Gao 0004	Error Analysis and Stochastic Modeling of Low-cost MEMS Accelerometer.	J. Intell. Robotic Syst.	2006	DBLP DOI BibTeX RDF	dead reckoning (DR), Gauss-Markov process, micro electro mechanical systems (MEMS), stochastic modeling, accelerometer, autoregressive model
66	Bo Hong, Scott A. Brandt, Darrell D. E. Long, Ethan L. Miller, Ying Lin	Using MEMS-based storage in computer systems - device modeling and management.	ACM Trans. Storage	2006	DBLP DOI BibTeX RDF	power management, request scheduling, MEMS-based storage
66	Didier Keymeulen, Wolfgang Fink, Michael I. Ferguson, Chris Peay, Boris Oks, Richard Terrile, Karl Yee	Evolutionary computation applied to the tuning of MEMS gyroscopes.	GECCO	2005	DBLP DOI BibTeX RDF	dynamic hill climbing, genetic algorithms, simulated annealing, MEMS, evolvable hardware, gyroscope
66	Theresa Maudie, Alex Hardt, Rick Nielsen, Dennis Stanerson, Ron Bieschke, Mike Miller	MEMS Manufacturing Testing: An Accelerometer Case Study.	ITC	2003	DBLP DOI BibTeX RDF	Electrical Trim, Measurements, Accelerometers, MEMS
66	N. Tayebi, A. K. Tayebi, Y. Belkacemi	Numerical Tools for Fracture of MEMS Devices.	Great Lakes Symposium on VLSI	1999	DBLP DOI BibTeX RDF	Fracture Mechanics, MEMS, Boundary Element Methods, CAD Tools, Meshless Methods
60	Nina Mahmoudian, M. Rastgaar Aagaah, G. Nakhaie Jazar, M. Mahinfalah	Dynamics of a Micro Electro Mechanical System (MEMS).	ICMENS	2004	DBLP DOI BibTeX RDF
60	Keith E. Ritala, Eric Miller	Success Factors in Commercializing University MEMS Technology through the WTC?s Microfabrication Laboratory.	ICMENS	2003	DBLP DOI BibTeX RDF
59	Corie L. Cobb, Ying Zhang, Alice M. Agogino, Jennifer Mangold	Knowledge-Based Evolutionary Linkage in MEMS Design Synthesis.	Linkage in Evolutionary Computation	2008	DBLP DOI BibTeX RDF
59	Jayaprakash Pisharath, Wei-keng Liao, Alok N. Choudhary	Design and Evaluation of Database Layouts for MEMS-Based Storage Systems.	IDEAS	2005	DBLP DOI BibTeX RDF
59	Didier Keymeulen, Michael I. Ferguson, Wolfgang Fink, Boris Oks, Chris Peay, Richard Terrile, Yen Cheng, Dennis Kim, Eric W. MacDonald, David Foor	Hardware Platforms for MEMS Gyroscope Tuning Based on Evolutionary Computation Using Open-Loop and Closed-Loop Frequency Response.	ICES	2005	DBLP DOI BibTeX RDF
59	Francis R. Szabo, Paul E. Kladiti	Design, Modeling and Testing of Polysilicon Optothermal Actuators for Power Scavenging Wireless Microrobots.	ICMENS	2004	DBLP DOI BibTeX RDF
59	Zhun Fan, Kisung Seo, Jianjun Hu, Ronald C. Rosenberg, Erik D. Goodman	System-Level Synthesis of MEMS via Genetic Programming and Bond Graphs.	GECCO	2003	DBLP DOI BibTeX RDF
57	Bohua Sun, Rui Zhang	MEMS Accelerometer With Two Thin Film Piezoelectric Read-Out.	ICMENS	2005	DBLP DOI BibTeX RDF	Piezoelectric accelerometer, Lead zirconate titanate (PZT) thin film, Sensitivity, MEMS
56	Ranran Yi, Bangcheng Han, Wei Sheng	Design on the Driving Mode of MEMS Vibratory Gyroscope.	ICIRA (2)	2008	DBLP DOI BibTeX RDF	self-oscillation, Multisim, fixed amplitude, MEMS, PLL
56	Raju Rangaswami, Zoran Dimitrijevic, Edward Y. Chang, Klaus E. Schauser	Building MEMS-based storage systems for streaming media.	ACM Trans. Storage	2007	DBLP DOI BibTeX RDF	Storage architecture, multidisk storage, streaming media, I/O scheduling, MEMS-based storage
56	Greg Hoover, Forrest Brewer, Timothy Sherwood	Towards understanding architectural tradeoffs in MEMS closed-loop feedback control.	CASES	2007	DBLP DOI BibTeX RDF	MEMS control, embedded architecture
56	Hailing Yu, Divyakant Agrawal, Amr El Abbadi	Exploiting sequential access when declustering data over disks and MEMS-based storage.	Distributed Parallel Databases	2006	DBLP DOI BibTeX RDF	Multi-dimensional datasets, Data placement scheme, Distributed algorithms, Range queries, MEMS-based storage
56	Libor Rufer, Salvador Mir, Emmanuel Simeu, C. Domingues	On-Chip Pseudorandom MEMS Testing.	J. Electron. Test.	2005	DBLP DOI BibTeX RDF	BIST, pseudorandom sequences, impulse response, MEMS testing
56	Clark T.-C. Nguyen	RF MEMS in wireless architectures.	DAC	2005	DBLP DOI BibTeX RDF	RF MEMS, RF front end, micromechanical circuit, switch, resonator, quality factor, capacitor, inductor
56	Sazzadur Chowdhury, Majid Ahmadi, William C. Miller	The Concept of a 3-D Cubic Acoustical Sensor Microarray Cluster for Use in a Hearing Instrument.	ICMENS	2004	DBLP DOI BibTeX RDF	Capacitive acoustical sensor, Microarray cluster, Jearing Instrument, directional sensitivity, MEMS, speech intelligibility
56	François Pêcheux	A Methodology for Process Design Simulators of MEMS Based on VRML and JAVA.	MSE	2001	DBLP DOI BibTeX RDF	Interactive Computer Based Learning Environment, Pedagogical Simulation, Java, VRML, MEMS, Process Design
52	Dennis Gibson, Carla N. Purdy, Alva Hare, Fred R. Beyette Jr.	Design Automation of MEMS Systems Using Behavioral Modeling.	Great Lakes Symposium on VLSI	1999	DBLP DOI BibTeX RDF	CAD for MEMS, behavioral modeling, design automation, MEMS
50	Jonathan Lueke, Noor Al Quddus, Walied A. Moussa, Aman Chahal	A Parametric Study of Thermal Effects on the Reliability of RF MEMS Switches.	ICMENS	2005	DBLP DOI BibTeX RDF
50	Xiao-Ming Wu 0001, Ning-xin Zhang, Tianling Ren, Litian Liu	Nondestructive Evaluation of MEMS Devices by Laser Confocal Measurements.	ICMENS	2005	DBLP DOI BibTeX RDF
50	P. D. Grant, M. W. Denhoff, Raafat R. Mansour	A Comparison between RF MEMS Switches and Semiconductor Switches.	ICMENS	2004	DBLP DOI BibTeX RDF
50	Khaled Sadek, Walied A. Moussa	Application of Adaptive Multilevel Substructuring Technique to Model CMOS Micromachined Thermistor Gas Sensor, Part (II): Effect of Manufacturing Uncertainties in the Reliability of MEMS.	ICMENS	2003	DBLP DOI BibTeX RDF
50	Angela Antoniu, Mark Salomons, Nicolae Reus	Effects of Electrostatic Charge Accumulation During MEMS Fabrication.	ICMENS	2003	DBLP DOI BibTeX RDF
49	Gregory Hornby, William F. Kraus, Jason D. Lohn	Evolving MEMS Resonator Designs for Fabrication.	ICES	2008	DBLP DOI BibTeX RDF
49	Like Yan, Qingsong Shi, Tiefei Zhang, Tianzhou Chen	PZSPTF: Parallelism-aware and Zone-based Shortest Positioning TimeFirst Scheduling for MEMS-based Storage Devices.	PerCom	2008	DBLP DOI BibTeX RDF
49	Joan Lluís Lopez, Jordi Teva, Arantxa Uranga, Francesc Torres 0001, Jaume Verd, Gabriel Abadal, Núria Barniol, Jaume Esteve, Francesc Pérez-Murano	Mixing in a 220MHz CMOS-MEMS.	ISCAS	2007	DBLP DOI BibTeX RDF
49	Yan Liu 0001, Ian Gorton, Len Bass, Cuong Hoang, Suhail Abanmi	MEMS: A Method for Evaluating Middleware Architectures.	QoSA	2006	DBLP DOI BibTeX RDF
49	Xingguo Xiong, Yu-Liang Wu, Wen-Ben Jone	Design and Analysis of Self-Repairable MEMS Accelerometer.	DFT	2005	DBLP DOI BibTeX RDF
49	Reza Asgary, Karim Mohammadi	A New Probabilistic Neural Network for Fault Detection in MEMS.	ICANN (2)	2005	DBLP DOI BibTeX RDF
49	Xingguo Xiong, Yu-Liang Wu, Wen-Ben Jone	A Dual-Mode Built-In Self-Test Technique for Capacitive MEMS Devices.	VTS	2004	DBLP DOI BibTeX RDF
49	Manuel Innocent, Piet Wambacq, Stéphane Donnay, Harrie A. C. Tilmans, Willy M. C. Sansen, Hugo De Man	An analytic Volterra-series-based model for a MEMS variable capacitor.	IEEE Trans. Comput. Aided Des. Integr. Circuits Syst.	2003	DBLP DOI BibTeX RDF
49	Bo Hong, Scott A. Brandt, Darrell D. E. Long, Ethan L. Miller, Karen A. Glocer, Zachary N. J. Peterson	Zone-Based Shortest Positioning Time First Scheduling for MEMS-Based Storage Devices.	MASCOTS	2003	DBLP DOI BibTeX RDF
49	Raju Rangaswami, Zoran Dimitrijevic, Edward Y. Chang, Klaus E. Schauser	MEMS-based Disk Buffer for Streaming Media Servers.	ICDE	2003	DBLP DOI BibTeX RDF
49	Sazzadur Chowdhury, Majid Ahmadi, Graham A. Jullien, William C. Miller	A MEMS socket system for high density SoC interconnection.	ISCAS (1)	2002	DBLP DOI BibTeX RDF
49	John Linwood Griffin, Steven W. Schlosser, Gregory R. Ganger, David Nagle	Modeling and performance of MEMS-based storage devices.	SIGMETRICS	2000	DBLP DOI BibTeX RDF
49	Tamal Mukherjee, Gary K. Fedder	Hierarchical Mixed-Domain Circuit Simulation, Synthesis and Extraction Methodology for MEMS.	J. VLSI Signal Process.	1999	DBLP DOI BibTeX RDF
47	Philip Chu	Avery Dennison Micro-Nano Replication Capabilities for MEMS and Microfluidics.	ICMENS	2005	DBLP DOI BibTeX RDF	Polymer, Embossing, MEMS, Microfluidics
47	Sazzadur Chowdhury, Majid Ahmadi, William C. Miller	Nonlinear Effects in MEMS Capacitive Microphone Design.	ICMENS	2003	DBLP DOI BibTeX RDF	capacitive microphone, pull-in voltage, diaphragm deformation, electrostatic force, nonlinearity, MEMS
46	Heyoung Lee, Jung Wook Park, Abdelsalam Helal	Estimation of Indoor Physical Activity Level Based on Footstep Vibration Signal Measured by MEMS Accelerometer in Smart Home Environments.	MELT	2009	DBLP DOI BibTeX RDF	Caloric energy expenditure estimation, Indoor activity detection, Localization of footstep source, MEMS accelerometer, Personal health care, Sensor networks, Smart homes
46	Weiwei Shan, Xiqun Zhu, Yuan Ma	Adaptive Fuzzy Logic Controller and Its Application in MEMS Mirror Actuation Feedback Control.	IDEAL	2009	DBLP DOI BibTeX RDF	variable universe, MEMS mirror, electrostatic actuation, feedback control, Fuzzy logic controller
46	Tao Chen 0010, Liguo Chen, Lining Sun, Jiachou Wang, Xinxin Li	A Sidewall Piezoresistive Force Sensor Used in a MEMS Gripper.	ICIRA (2)	2008	DBLP DOI BibTeX RDF	Microgripper, Sidewall piezoresistive sensor, MEMS
46	Hailing Yu, Divyakant Agrawal, Amr El Abbadi	MEMS based storage architecture for relational databases.	VLDB J.	2007	DBLP DOI BibTeX RDF	Relational databases, Storage, MEMS, Data placement
46	Emmanuel Simeu, Salvador Mir, R. Kherreddine, Hoang Nam Nguyen	Envelope Detection Based Transition Time Supervision for Online Testing of RF MEMS Switches.	IOLTS	2007	DBLP DOI BibTeX RDF	RF MEMS, capacitive switch, envelope detection, transition time, Online testing, recursive estimation
46	Norbert Dumas, Florence Azaïs, Laurent Latorre, Pascal Nouet	Electro-thermal Stimuli for MEMS Testing in FSBM Technology.	J. Electron. Test.	2006	DBLP DOI BibTeX RDF	bulk micromachining, electro-thermal stimuli, testing, defects, MEMS
46	Ian G. Foulds, M. Parameswaran	Hysteresis Spring Single Digital Input Bistable Mechanism.	ICMENS	2005	DBLP DOI BibTeX RDF	Bistable, Single Input, Surface Micromachining Technology, PolyMUMPS, MEMS
46	S. K. De, Narayan R. Aluru	Physical And Reduced-Order Dynamic Analysis of MEMS.	ICCAD	2003	DBLP DOI BibTeX RDF	switching speed and power, dynamics, MEMS, reduced order modeling, resonant frequency
45	Ying Zhang, Raffi R. Kamalian, Alice M. Agogino, Carlo H. Séquin	Design synthesis of microelectromechanical systems using genetic algorithms with component-based genotype representation.	GECCO	2006	DBLP DOI BibTeX RDF	MEMS design synthesis, MOGA, component-based genotype representation, evolutionary multiobjective optimization
45	Salvador Mir, Benoît Charlot, Bernard Courtois	Extending Fault-Based Testing to Microelectromechanical Systems.	J. Electron. Test.	2000	DBLP DOI BibTeX RDF	nodal simulation, fault modeling, fault simulation, defects, MEMS, HDLs, failure modes
43	Sassan Tabatabaei, Aaron Partridge	Silicon MEMS Oscillators for High-Speed Digital Systems.	IEEE Micro	2010	DBLP DOI BibTeX RDF	silicon oscillator, microelectromechanical systems, MEMS resonator, MEMS packaging, serial interfaces, hardware, clock, oscillator, digital clocking
43	Timothy P. Kurzweg, Steven P. Levitan, Philippe J. Marchand, Jose A. Martinez, Kurt R. Prough, Donald M. Chiarulli	A CAD Tool for Optical MEMS.	DAC	1999	DBLP DOI BibTeX RDF	MEMS-CAD, MOEMS, micro-optics, optical MEMS
40	Nassif Ghoussoub, Yujin Guo	Dynamic Deflection of Electrostatic MEMS.	ICMENS	2005	DBLP DOI BibTeX RDF
40	Khaled Sadek, Walied A. Moussa	MEMS Design for Fabrication.	ICMENS	2005	DBLP DOI BibTeX RDF
40	Scott Samson, Rahul Agarwal, Sunny Kedia, Weidong Wang, Shinzo Onishi, John Bumgarner	Fabrication Processes for Packaged Optical MEMS Devices.	ICMENS	2005	DBLP DOI BibTeX RDF
40	Hikaru Takamatsu, Toshihiko Sugiura	Nonlinear Vibration of Electrostatic MEMS under DC and AC Applied Voltage.	ICMENS	2005	DBLP DOI BibTeX RDF
40	Jérôme Juillard, Éric Colinet, Hana Baili	A Piecewise Response Surface Method for Simulating MEMS with Uncertain Parameters.	ICMENS	2004	DBLP DOI BibTeX RDF
40	Roman V. Kruzelecky, Brian Wong, Jing Zou, Emile Haddad, Wes Jamroz, Arthur Yelon, Richard Beaudry, Olivier Grenier, Wanping Zheng, Linh Ngo Phong	Advanced MEMS and Integrated-Optic Components for Multifunctional Integrated Optical Micromachines.	ICMENS	2004	DBLP DOI BibTeX RDF
40	Xiaoyang Zhu	Monolayer Surface Coatings Solve Stiction and Drift Problems in MEMS.	ICMENS	2003	DBLP DOI BibTeX RDF
40	Daniel C. Asmar, Medhat Moussa, John S. Zelek	On the Role of Machine Learning Algorithms in Developing MEMS Components.	ICMENS	2003	DBLP DOI BibTeX RDF
40	Yuan Ma	MicroElectroMechanical Systems (MEMS) Based Wavelength-Selective Building Block in a Transparent Network Architecture.	CNSR	2008	DBLP DOI BibTeX RDF	wavelength selective building block, micro-mirror, transparent network, electrostatic
40	Rajesh Pande, Rajendra M. Patrikar	A CAD tool for RF MEMS devices.	ASP-DAC	2008	DBLP DOI BibTeX RDF
40	Jason D. Lohn, William F. Kraus, Gregory S. Hornby	Automated design of a MEMS resonator.	IEEE Congress on Evolutionary Computation	2007	DBLP DOI BibTeX RDF
40	Darrin J. Young, Mark A. Zurcher, Wen H. Ko, Maroun Semaan, Cliff A. Megerian	Implantable MEMS Accelerometer Microphone for Cochlear Prosthesis.	ISCAS	2007	DBLP DOI BibTeX RDF
40	Guangyi Sun, Xin Zhao, Guizhang Lu	Voxel-Based Modeling and Rendering for Virtual MEMS Fabrication Process.	IROS	2006	DBLP DOI BibTeX RDF
40	Bernhard E. Boser	From micro to nano: MEMS as an interface to the nano world.	ICCAD	2006	DBLP DOI BibTeX RDF
40	A. Bendali, R. Labedan, F. Domingue, V. Nerguizian	Holes Effects on RF MEMS Parallel Membranes Capacitors.	CCECE	2006	DBLP DOI BibTeX RDF
40	Vishwanath Natarajan, Soumendu Bhattacharya, Abhijit Chatterjee	Alternate Electrical Tests for Extracting Mechanical Parameters of MEMS Accelerometer Sensors.	VTS	2006	DBLP DOI BibTeX RDF
40	Seungbae Lee, Gi-Joon Nam, Junseok Chae, Hanseup Kim, Alan J. Drake	Two-dimensional position detection system with MEMS accelerometers, readout circuitry, and microprocessor for padless mouse applications.	IEEE Trans. Very Large Scale Integr. Syst.	2005	DBLP DOI BibTeX RDF
40	Hagay Bamberger, Moshe Shoham	A New Configuration of a Six Degrees-of-freedom Parallel Robot for MEMS Fabrication.	ICRA	2004	DBLP DOI BibTeX RDF
40	Hailing Yu, Divyakant Agrawal, Amr El Abbadi	Declustering Two-Dimensional Datasets over MEMS-Based Storage.	EDBT	2004	DBLP DOI BibTeX RDF
40	Sazzadur Chowdhury, Majid Ahmadi, William C. Miller	A MEMS custom micropackaging solution.	ISCAS (3)	2003	DBLP DOI BibTeX RDF