Search results for "metrology"

Hits ?▲	Authors	Title	Venue	Year	Link	Author keywords
141	K. J. Stanley, Timothy D. Stanley, José Maia	Wafer fabrication: realizing 300mm fab productivity improvements through integrated metrology.	WSC	2002	DBLP DOI BibTeX RDF
94	Yaw-Jen Chang, Yuan Kang, Chin-Liang Hsu, Chi-Tim Chang, Tat Yan Chan	Virtual Metrology Technique for Semiconductor Manufacturing.	IJCNN	2006	DBLP DOI BibTeX RDF
76	Fabricio Fishkel, Anath Fischer, Sigal Ar	Verification of Engineering Models Based on Bipartite Graph Matching for Inspection Applications.	GMP	2006	DBLP DOI BibTeX RDF	Computational metrology, Reverse engineering, Metrology, Mesh processing, Bipartite graph matching
69	José Otero, Luciano Sánchez, Jesús Alcalá-Fdez	Fuzzy-genetic optimization of the parameters of a low cost system for the optical measurement of several dimensions of vehicles.	Soft Comput.	2008	DBLP DOI BibTeX RDF	Fuzzy uncertainty, Genetic algorithms, Stereoscopic vision, Metrology, Random sets
63	Xiaoming Deng 0001, Fuchao Wu, Yihong Wu 0002, Fuqing Duan	Visual metrology with uncalibrated radial distorted images.	ICPR	2008	DBLP DOI BibTeX RDF
63	Seong-ho Kang, Mitchell W. Pryor, Delbert Tesar	Kinematic Model and Metrology System for Modular Robot Calibration.	ICRA	2004	DBLP DOI BibTeX RDF
63	Yue-Tsang Chen, Chauchin Su	Analog Module Metrology Using MNABST-1 P1149.4 Test Chip.	Asian Test Symposium	1998	DBLP DOI BibTeX RDF
54	Christoph Heinzl, Johann Kastner, M. Eduard Gröller	Surface Extraction from Multi-Material Components for Metrology using Dual Energy CT.	IEEE Trans. Vis. Comput. Graph.	2007	DBLP DOI BibTeX RDF	DECT image fusion, local surface extraction, Dual Energy CT, dimensional measurement, variance comparison, metrology
47	Dongtai Liang, Xuanyin Wang	Planar Visual Metrology using Partition-based Camera Calibration.	RAM	2008	DBLP DOI BibTeX RDF
47	Fan-Tien Cheng, Yeh-Tung Chen, Yu-Chuan Su, Deng-Lin Zeng	Method for Evaluating Reliance Level of a Virtual Metrology System.	ICRA	2007	DBLP DOI BibTeX RDF
47	Scott C.-H. Huang, Shamila Makki, Niki Pissinou	Accusation Resolution Using Security Metrology.	WASA	2006	DBLP DOI BibTeX RDF
47	Enrico S. Canuto, Fabio Musso	Embedded Model Control: Application to Interferometric Metrology Lines.	ETFA	2006	DBLP DOI BibTeX RDF
47	Alain Abran, Asma Sellami, Witold Suryn	Metrology, Measurement and Metrics in Software Engineering.	IEEE METRICS	2003	DBLP DOI BibTeX RDF
47	B. Muralikrishnan, Kayvan Najarian, J. Raja	Process Mapping and Functional Correlation in Surface Metrology: A Novel Clustering Application.	ICPR (1)	2002	DBLP DOI BibTeX RDF
47	Robert Wright II, Marlin Shopbell, Kristin Rust, Silpa Sigireddy	Wafer fabrication: effects of metrology load port buffering in automated 300mm factories.	WSC	2002	DBLP DOI BibTeX RDF
39	Feng Guo 0006, Rama Chellappa	Video Metrology Using a Single Camera.	IEEE Trans. Pattern Anal. Mach. Intell.	2010	DBLP DOI BibTeX RDF	Video metrology, mensuration, rectification
39	Yisong Chen, Horace Ho-Shing Ip	Single view metrology of wide-angle lens images.	Vis. Comput.	2006	DBLP DOI BibTeX RDF	Lens distortion correction, Euclidean measurement, Single view metrology, Error analysis
39	Chauchin Su, Yi-Ren Cheng, Yue-Tsang Chen, Shing Tenchen	Analog signal metrology for mixed signal ICs.	Asian Test Symposium	1997	DBLP DOI BibTeX RDF	Analog signal metrology, multiple period low-rate sampled waveform, high-rate sampled waveform, DSP based testing, on-chip ADC, 20 MHz, mixed analogue-digital integrated circuits, Signal reconstruction, mixed signal IC
39	Heikki Ailisto	CAD and Vision in Rangefinder-based Dimensional Metrology.	3DIM	1997	DBLP DOI BibTeX RDF	rangefinder-based dimensional metrology, automated 3D measurement, measurement planning, measurement execution, graphical measurement planning tool, automatic optical measurement systems, sensory feedback, performance criteria, CAD, CAD, vision
33	Alessandro Schiavi, Fabrizio Mazzoleni, Alessio Facello, Andrea Prato	Metrology for next generation "Phygital Sensors".	MetroInd4.0&IoT	2023	DBLP DOI BibTeX RDF
33	Tamador Salih Saeed	Metrology for All: Women in Metrology (WIM): 2022 First Forum.	IEEE Instrum. Meas. Mag.	2022	DBLP DOI BibTeX RDF
33	Giada Luppino, Lisa Bosisio, Chiara Conese, Davide Maria Fabris, Marco Tarabini	Metrology of a Monocular Vision System for Markers Localization and Tracking.	MetroInd4.0& IoT	2022	DBLP DOI BibTeX RDF
33	Wiebke Heeren, Bernd Müller, Gianfranco Miele, Tuukka Mustapää, Daniel Hutzschenreuter, Clifford Brown, Oksana Baer	SmartCom - Key Findings for Digitalisation in Metrology.	MetroInd4.0&IoT	2021	DBLP DOI BibTeX RDF
33	Maximilian Gruber, Sascha Eichstädt, Julia Neumann, Adrian Paschke	Semantic Information in Sensor Networks: How to Combine Existing Ontologies, Vocabularies and Data Schemes to Fit a Metrology Use Case.	MetroInd4.0&IoT	2020	DBLP DOI BibTeX RDF
33	Mark Kuster	A Measurement Information Infrastructure's Benefits for Industrial Metrology and IoT.	MetroInd4.0&IoT	2020	DBLP DOI BibTeX RDF
33	Roberto Benitez, Roberto Benitez Jr., Cesar Ramirez, Jose A. Vazquez	Sensors calibration for Metrology 4.0.	MetroInd4.0&IoT	2019	DBLP DOI BibTeX RDF
33	Richard Davis 0001	Why the Mohs scale remains relevant for metrology [Basic Metrology].	IEEE Instrum. Meas. Mag.	2018	DBLP DOI BibTeX RDF
33	Richard Davis 0001	The center of a souffle-metrology in the kitchen [Basic metrology].	IEEE Instrum. Meas. Mag.	2018	DBLP DOI BibTeX RDF
33	Henry Swofford, Ted Vosk	Metrology applied to forensic pattern evidence domains - A call for more forensic science metrology principles.	IEEE Instrum. Meas. Mag.	2017	DBLP DOI BibTeX RDF
33	Annarita Lazzari, Jean-Michel Pou, Christopher DuBois, Laurent Leblond	Smart metrology: the importance of metrology of decisions in the big data era.	IEEE Instrum. Meas. Mag.	2017	DBLP DOI BibTeX RDF
33	Bryan P. Kibble	Everyday instruments from basic metrology [Basic Metrology].	IEEE Instrum. Meas. Mag.	2015	DBLP DOI BibTeX RDF
33	Alessandro Ferrero, Veronica Scotti	The story of the right measurement that caused injustice and the wrong measurement that did justice; How to explain the importance of metrology to lawyers and judges [Legal Metrology].	IEEE Instrum. Meas. Mag.	2015	DBLP DOI BibTeX RDF
33	Dongil Kim, Pilsung Kang 0001, Seung-kyung Lee, Seokho Kang 0001, Seungyong Doh, Sungzoon Cho	Improvement of virtual metrology performance by removing metrology noises in a training dataset.	Pattern Anal. Appl.	2015	DBLP DOI BibTeX RDF
33	Thiago de Castro Martins, Marcos de Sales Guerra Tsuzuki, Rogerio Y. Takimoto, Ahmad Barari, Giulliano B. Gallo, Marcos A. A. Garcia, Hamilton Tiba	Algorithmic iterative sampling in coordinate metrology plan for coordinate metrology using dynamic uncertainty analysis.	INDIN	2014	DBLP DOI BibTeX RDF
33	Chun Hung Cheng, Dehong Huo, Xi Zhang, Wei Dai 0005, Paul G. Maropoulos	Large Volume Metrology Process Model: Measurability Analysis with Integration of Metrology Classification Model and Feature-Based Selection Model.	DET	2009	DBLP DOI BibTeX RDF
33	Anath Fischer, Raffaello Levi	Special Issue on Reverse Engineering and Computational Metrology: Part 2 - Computational Metrology Strategies and Methods.	J. Comput. Inf. Sci. Eng.	2007	DBLP DOI BibTeX RDF
32	Tung-Ho Lin, Fan-Tien Cheng, Aeo-Juo Ye, Wei-Ming Wu, Min-Hsiung Hung	A novel key-variable sifting algorithm for virtual metrology.	ICRA	2008	DBLP DOI BibTeX RDF
32	Yu-Chuan Su, Wen-Huang Tsai, Fan-Tien Cheng, Wei-Ming Wu	Development of a dual-stage virtual metrology architecture for TFT-LCD manufacturing.	ICRA	2008	DBLP DOI BibTeX RDF
32	P. Ravindran, Nicola J. Ferrier, S. M. Park, P. F. Nealey	Image Based Metrology for Quantitative Analysis of Local Structural Similarity of Nanostructures.	ICIP (4)	2007	DBLP DOI BibTeX RDF
32	Bojian Liang, Zezhi Chen, Nick E. Pears	Uncalibrated Two-View Metrology.	ICPR (1)	2004	DBLP DOI BibTeX RDF
32	Mohammad Saadatseresht, Farhad Samadzadegan, Ali Azizi	ANN-Based Visibility Prediction for Camera Placement in Vision Metrology.	CRV	2004	DBLP DOI BibTeX RDF
32	Guanghui Wang 0001, Yihong Wu 0002, Zhanyi Hu	A Novel Approach for Single View Based Plane Metrology.	ICPR (2)	2002	DBLP DOI BibTeX RDF
32	Antonio Criminisi	Single-View Metrology: Algorithms and Applications.	DAGM-Symposium	2002	DBLP DOI BibTeX RDF
32	Chauchin Su, Yue-Tsang Chen, Chung-Len Lee 0001	Analog Metrology and Stimulus Selection in a Noisy Environment.	Asian Test Symposium	1999	DBLP DOI BibTeX RDF	Mixed Signal and Analog Test
32	Ian D. Reid 0001, Andrew Zisserman	Goal-directed Video Metrology.	ECCV (2)	1996	DBLP DOI BibTeX RDF
31	Alan M. Lytle, Kamel S. Saidi	NIST research in autonomous construction.	Auton. Robots	2007	DBLP DOI BibTeX RDF	Construction visualization, Robotic crane, Indoor positioning and tracking, Parallel kinematic machine, 3D imaging, Construction automation
31	Andrea Bondavalli, Andrea Ceccarelli, Lorenzo Falai, Michele Vadursi	Foundations of Measurement Theory Applied to the Evaluation of Dependability Attributes.	DSN	2007	DBLP DOI BibTeX RDF
31	Duane S. Boning, Karthik Balakrishnan, Hong Cai, Nigel Drego, Ali Farahanchi, Karen Gettings, Daihyun Lim, Ajay Somani, Hayden Taylor, Daniel Truque, Xiaolin Xie	Variation.	ISQED	2007	DBLP DOI BibTeX RDF
31	Erik Novak, Der-Shen Wan, Paul Unruh, Joanna Schmit	Dynamic MEMS Measurement Using a Strobed Interferometric System with Combined Coherence Sensing and Phase Information.	ICMENS	2003	DBLP DOI BibTeX RDF
22	José R. Villar 0001, Adolfo Otero, José Otero, Luciano Sánchez	Taximeter verification with GPS and soft computing techniques.	Soft Comput.	2010	DBLP DOI BibTeX RDF	Vague data, Fuzzy fitness function, Genetic algorithms, GPS, Fuzzy systems, Metrology
22	Jeff Klingner	The pupillometric precision of a remote video eye tracker.	ETRA	2010	DBLP DOI BibTeX RDF	pupillometry, eye tracking, metrology, pupil
22	Tong Tu, Wooi-Boon Goh	Using CCD Moiré Pattern Analysis to Implement Pressure-Sensitive Touch Surfaces.	CAIP	2009	DBLP DOI BibTeX RDF	Moiré patterns, Image-based metrology, Surface deformation analysis, Human computer interface, Vision-based interface
22	Prosenjit Bose, Pat Morin	Testing the Quality of Manufactured Disks and Balls.	Algorithmica	2004	DBLP DOI BibTeX RDF	Tolerancing metrology, Guaranteed quality, Testing, Sampling, Quality assurance, Roundness, Disks, Spheres, Cylinders
22	Sotiris Malassiotis, Michael G. Strintzis	Stereo vision system for precision dimensional inspection of 3D holes.	Mach. Vis. Appl.	2003	DBLP DOI BibTeX RDF	Knowledge-based vision, Stereoscopic matching, Metallic surfaces, Inspection, Metrology
22	John Horst, Thomas R. Kramer, Keith Stouffer, Joseph Falco, Hui-Min Huang, Frederick M. Proctor, Albert Wavering	Distributed Testing of an Equipment-Level Interface Specification.	Symposium on Object-Oriented Real-Time Distributed Computing	2002	DBLP DOI BibTeX RDF	coordinate measuring machine, real-time systems, object-oriented, conformance test, test suite, distributed testing, interface specifications, metrology, validation test
22	Derek C. Stanford, Adrian E. Raftery	Finding Curvilinear Features in Spatial Point Patterns: Principal Curve Clustering with Noise.	IEEE Trans. Pattern Anal. Mach. Intell.	2000	DBLP DOI BibTeX RDF	CEM algorithm, spatial point process, visual defect metrology, EM algorithm, smoothing, Hough transform, model-based clustering, earthquake, BIC, Bayes factor
22	Olivier Devillers, Franco P. Preparata	Evaluating the cylindricity of a nominally cylindrical point set.	SODA	2000	DBLP BibTeX RDF	cylindricity, minimum cyclinder, zone cylinder, roundness, metrology
22	Wen-Jean Hsueh, Erik K. Antonsson	Automatic high-resolution optoelectronic photogrammetric 3D surface geometry acquisition system.	Mach. Vis. Appl.	1997	DBLP DOI BibTeX RDF	Range-finding, Triangulation, Active vision, Photogrammetry, Metrology
22	Lawrence O'Gorman	Subpixel Precision of Straight-Edged Shapes for Registration and Measurement.	IEEE Trans. Pattern Anal. Mach. Intell.	1996	DBLP DOI BibTeX RDF	fiducial marks, subpixel precision, image processing, Registration, machine vision, precision, metrology
22	Aldo Cumani, Antonio Guiducci	Geometric camery calibration: the virtual camera approach.	Mach. Vis. Appl.	1995	DBLP DOI BibTeX RDF	Computer vision, Camera calibration, Metrology, Lens distortion
22	M. Y. Amirat, Jean Pontnau, Francis Artigue	A three-dimensional measurement system for robot applications.	J. Intell. Robotic Syst.	1994	DBLP DOI BibTeX RDF	Robot calibration, vision sensor, 3D dynamic metrology, noncontacting sensor, Euler angles, external position sensor
16	Yifan Xie, Tianhui Wang, Young-Seon Jeong 0001, Ali Tosyali, Myong K. Jeong	True sparse PCA for reducing the number of essential sensors in virtual metrology.	Int. J. Prod. Res.	2024	DBLP DOI BibTeX RDF
16	Philipp Euringer, Gerald Hechenblaikner, Francis Soualle, Walter Fichter	Performance Analysis of Sequential Carrier- and Code-Tracking Receivers in the Context of High-Precision Spaceborne Metrology Systems.	IEEE Trans. Instrum. Meas.	2024	DBLP DOI BibTeX RDF
16	Wenwen Tian, Jiong Zhang, Fei Zhao, Gedong Jiang, Xuesong Mei, Guangde Chen, Hao Wang 0048	A Novel Fuzzy Echo State Broad Learning System for Surface Roughness Virtual Metrology.	IEEE Trans. Ind. Informatics	2024	DBLP DOI BibTeX RDF
16	Mark O. Neisser, Ndubuisi G. Orji, Harry J. Levinson, Umberto Celano, James R. Moyne, Supika Mashiro, Dan Wilcox, Slava Libman	How Lithography and Metrology Are Enabling Yield in the Next Generation of Semiconductor Patterning.	Computer	2024	DBLP DOI BibTeX RDF
16	Pavol Kajánek, Alojz Kopácik, Peter Kyrinovic, Ján Erdélyi, Marián Marcis, Marek Frastia	Metrology of Short-Length Measurers - Development of a Comparator for the Calibration of Measurers Based on Image Processing and Interferometric Measurements.	Sensors	2024	DBLP DOI BibTeX RDF
16	Clayton Forssén, Isak Silander, Johan Zakrisson, Eynas Amer, Dávid Szabó, Thomas Bock, André Kussike, Tom Rubin, Domenico Mari, Stefano Pasqualin, Zaccaria Silvestri, Djilali Bentouati, Ove Axner, Martin Zelan	Demonstration of a Transportable Fabry-Pérot Refractometer by a Ring-Type Comparison of Dead-Weight Pressure Balances at Four European National Metrology Institutes.	Sensors	2024	DBLP DOI BibTeX RDF
16	Andrey Tsapalov, Konstantin Kovler	Metrology for Indoor Radon Measurements and Requirements for Different Types of Devices.	Sensors	2024	DBLP DOI BibTeX RDF
16	Kartikay Tehlan, Michele Bissolo, Riccardo Silvioli, Johannes Oberreuter, Andreas Stier, Nassir Navab, Thomas Wendler 0001	Magnetisation Reconstruction for Quantum Metrology.	Bildverarbeitung für die Medizin	2024	DBLP DOI BibTeX RDF
16	Kunal Sinha, Rajas Dalvi, M. Girish Chandra, Sourav Chatterjee	MetQuan - A Comprehensive Toolkit for Variational Quantum Sensing and Metrology.	COMSNETS	2024	DBLP DOI BibTeX RDF
16	Yongjiang Huang, Xixiang Liu, Qiantong Shao, Zixuan Wang	Virtual Metrology Filter-Based Algorithms for Estimating Constant Ocean Current Velocity.	Remote. Sens.	2023	DBLP DOI BibTeX RDF
16	Janusz Kaczmarek, Massimo Ortolano, Oliver Power, Jan Kucera 0001, Luca Callegaro, Vincenzo D'Elia, Martina Marzano, Robert Walsh, Miroslaw Koziol, Ryszard Rybski	Virtual Training Laboratory for Primary Impedance Metrology.	IEEE Trans. Instrum. Meas.	2023	DBLP DOI BibTeX RDF
16	Simone Donadello, Elio K. Bertacco, Davide Calonico, Cecilia Clivati	Embedded Digital Phase Noise Analyzer for Optical Frequency Metrology.	IEEE Trans. Instrum. Meas.	2023	DBLP DOI BibTeX RDF
16	Atasi Chatterjee, Mattias Kruskopf, Martin Götz, Yefei Yin, Eckart Pesel, Pierre Gournay, Benjamin Rolland, Jan Kucera 0001, Stephan Bauer, Klaus Pierz, Bernhard Schumacher, Hansjörg Scherer	Performance and Stability Assessment of Graphene-Based Quantum Hall Devices for Resistance Metrology.	IEEE Trans. Instrum. Meas.	2023	DBLP DOI BibTeX RDF
16	Muhammad Azwan Ibrahim, Faizan Qamar, Zarina Shukur, Nasharuddin Zainal, Nazri Marzuki, Maria Ulfah Siregar	Formalizing Attack Tree on Security Object for MySANi in Legal Metrology.	Syst.	2023	DBLP DOI BibTeX RDF
16	Daniel Gauder, Johannes Gölz, Niels Jung, Gisela Lanza	Development of an adaptive quality control loop in micro-production using machine learning, analytical gear simulation, and inline focus variation metrology for zero defect manufacturing.	Comput. Ind.	2023	DBLP DOI BibTeX RDF
16	Dong-Joon Lim, Sangjin Kim, Uijong Hwang, Sanghun Jeong, Dongwook Kim, Yeolib Kim	Development of a virtual metrology system for smart manufacturing: A case study of spandex fiber production.	Comput. Ind.	2023	DBLP DOI BibTeX RDF
16	David Macii	Basics of Industrial Metrology.	IEEE Instrum. Meas. Mag.	2023	DBLP DOI BibTeX RDF
16	Akshay Agarwal, Minxu Peng, Vivek K. Goyal	Continuous-Time Modeling and Analysis of Particle Beam Metrology.	IEEE J. Sel. Areas Inf. Theory	2023	DBLP DOI BibTeX RDF
16	Jia-Xuan Liu, Jing Yang, Hai-Long Shi, Sixia Yu	Optimal Local Measurements in Many-body Quantum Metrology.	CoRR	2023	DBLP DOI BibTeX RDF
16	Jing Yang	Theory of Compression Channels for Post-selected Metrology.	CoRR	2023	DBLP DOI BibTeX RDF
16	Bappaditya Dey, Anh Tuan Ngo, Sara Sacchi, Víctor Blanco, Philippe Leray 0002, Sandip Halder	Applying Machine Learning Models on Metrology Data for Predicting Device Electrical Performance.	CoRR	2023	DBLP DOI BibTeX RDF
16	Angzhi Fan, Yu Huang 0017, Fei Xu, Sthitie Bom	Soft Sensing Regression Model: from Sensor to Wafer Metrology Forecasting.	CoRR	2023	DBLP DOI BibTeX RDF
16	Donatien Koulla Moulla, Ernest Mnkandla, Alain Abran	Evaluation of IoT Measurement Solutions from a Metrology Perspective.	Comput. Syst. Sci. Eng.	2023	DBLP DOI BibTeX RDF
16	Mankei Tsang	Operational meanings of a generalized conditional expectation in quantum metrology.	Quantum	2023	DBLP DOI BibTeX RDF
16	Masahito Hayashi, Yingkai Ouyang	Tight Cramér-Rao type bounds for multiparameter quantum metrology through conic programming.	Quantum	2023	DBLP DOI BibTeX RDF
16	Anna A. Dedkova, Igor V. Florinsky	Geomorphometry and microelectronic metrology: Converged realms.	Trans. GIS	2023	DBLP DOI BibTeX RDF
16	Naoki Takegawa, Noriyuki Furuichi	Traceability Management System Using Blockchain Technology and Cost Estimation in the Metrology Field.	Sensors	2023	DBLP DOI BibTeX RDF
16	Angzhi Fan, Yu Huang 0017, Fei Xu, Sthitie Bom	Soft-Sensing Regression Model: From Sensor to Wafer Metrology Forecasting.	Sensors	2023	DBLP DOI BibTeX RDF
16	Michael Fahrbach, Min Xu, Wilson Ombati Nyang'au, Oleg Domanov, Christian H. Schwalb, Zhi Li, Christian Kuhlmann 0003, Uwe Brand, Erwin Peiner	Damped Cantilever Microprobes for High-Speed Contact Metrology with 3D Surface Topography.	Sensors	2023	DBLP DOI BibTeX RDF
16	Patrick Frank	LiG Metrology, Correlated Error, and the Integrity of the Global Surface Air-Temperature Record.	Sensors	2023	DBLP DOI BibTeX RDF
16	Jie Wang 0042, Richard Chang 0002, Ziyuan Zhao, Ramanpreet Singh Pahwa	Robust Detection, Segmentation, and Metrology of High Bandwidth Memory 3D Scans Using an Improved Semi-Supervised Deep Learning Approach.	Sensors	2023	DBLP DOI BibTeX RDF
16	Carl Johan G. Nielsen, André Preumont	Adaptive Petal Reflector: In-Lab Software Configurable Optical Testing System Metrology and Modal Wavefront Reconstruction.	Sensors	2023	DBLP DOI BibTeX RDF
16	Yonggang Yan, Zhengxing Wu, Jianjun Cui, Kai Chen, Yanhong Tang, Ning Yang	Calibration Model Optimization for Strain Metrology of Equal Strength Beams Using Deflection Measurements.	Sensors	2023	DBLP DOI BibTeX RDF
16	Damir Malnar, Miroslav Vrankic	Optimising Time-Frequency Distributions: A Surface Metrology Approach.	Sensors	2023	DBLP DOI BibTeX RDF
16	Chen-Fu Chien 0001, Tran Hong Van Nguyen, Yi-Chiu Li, Ying-Jen Chen	Bayesian decision analysis for optimizing in-line metrology and defect inspection strategy for sustainable semiconductor manufacturing and an empirical study.	Comput. Ind. Eng.	2023	DBLP DOI BibTeX RDF
16	Chia-Yu Hsu, Yi-Wei Lu	Virtual metrology of material removal rate using a one-dimensional convolutional neural network-based bidirectional long short-term memory network with attention.	Comput. Ind. Eng.	2023	DBLP DOI BibTeX RDF
16	Richard Chang 0002, Wang Jie, Namrata Thakur, Ramanpreet Singh Pahwa	AI-based 3D Metrology and Defect Detection of HBMs in XRM Scans.	World Sci. Annu. Rev. Artif. Intell.	2023	DBLP DOI BibTeX RDF
16		2023 IEEE International Workshop on Metrology for Industry 4.0 & IoT, MetroInd4.0&IoT 2023, Brescia, Italy, June 6-8, 2023	MetroInd4.0&IoT	2023	DBLP DOI BibTeX RDF
16	Marko Esche, Levin Ho, Martin Nischwitz, Reinhard Meyer	Risk-Based Continuous Quality Control for Software in Legal Metrology.	FedCSIS	2023	DBLP DOI BibTeX RDF